Vacuum Coating Technology General Terms and Procedures (1)

1.1 Vacuum coating vacuumcoating: A method of preparing a film layer on a substrate under vacuum.

    1.2 Substrate substrate: film receiver.

    1.3 Test substrate testingsubstrate: used as a substrate for measurement and/or testing at the beginning of plating, during plating, or after plating.

    1.4 coating material coatingmaterial: raw materials used to prepare the film.

    1.5 Evaporation material evaporationmaterial: Coating material used for evaporation in vacuum evaporation.

    1.6 Sputtering materialsputteringmaterial: There is a coating material used for sputtering in vacuum sputtering.

    1.7 film material (membrane layer material) filmmaterial: the material that constitutes the film layer.

    1.8 Evaporation rate evaporationrate: The amount of material evaporated at a given time interval divided by the interval

    1.9 Sputtering rate: The amount of material sputtered at a given time interval divided by the time interval.

    1.10 deposition rate: The amount of material deposited on a substrate at a given time interval divided by the time interval and surface area of the substrate.

    1.11 Coating angle: The angle between the direction of particles incident on the substrate and the normal to the surface to be plated.

    2 craft

    2.1 Vacuum evaporation film vacuumevaporationcoating: The vacuum coating process that causes the coating material to evaporate.

    2.1.1 Simultaneous Evaporation simultaneousevaporation: Evaporation of various evaporation materials onto a substrate by vacuum evaporation with several evaporators.

    2.1.2 Evaporative evaporation evaporation evaporationevaporation: Evaporation of material evaporated from the evaporation field to vacuum evaporation on the substrate (This process is applied to large-area evaporation to obtain the desired film thickness distribution).

    2.1.3 Reactive Vacuum Evaporation reactivevacuumevaporation: Evaporation of the membrane material by reacting with the gas to obtain the desired chemical composition.

    2.1.4 Reactive Vacuum Evaporation in Evaporator The reactive vacuum evaporation inevaporator: reacts with various evaporation materials in the evaporator to obtain the vacuum evaporation of the ideal chemical composition film material.

    2.1.5 Direct heating evaporation: Direct heating evaporation: Evaporation The evaporation of the material must be the evaporation of the evaporation material (in or without).

    2.1.6 Induction Heating Evaporationinducedheatingevaporation: Evaporation of material through the induced eddy current heating.

    2.1.7 Electron beam evaporation electronbeam evaporation: The evaporation of heated evaporation material by electron bombardment.


2018年03月16日

Vacuum Coating Technology General Terms and Procedures (1)

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