Vacuum coating equipment operating principle and application industry

First, the operation of the electric control cabinet

1. Open water pump, gas source

2. Turn on the main power

3. Open the pump, vacuum gauge power supply, vacuum gauge position V1 position, waiting for the value is less than 10, then enter the next operation. It takes about 5 minutes.

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4. Open the mechanical pump, pre-pump, turn on the turbo pump power, start, vacuum gauge switch to V2 position, pumped to less than 2, about 20 minutes.

5. After observing that the turbomolecular pump reading reaches 250, turn off the pump. Open the front and high valve to continue vacuuming. After the vacuum is reached to a certain degree, open the right high vacuum gauge and observe the vacuum. Only when the vacuum reaches 2×10-3 can the electron gun power be turned on.

Second, the operation of DEF-6B electron gun power cabinet

Total power

2. At the same time, open the electron gun control I and electron gun control II power supply: press the electron gun control I power, delay switch, delay, power and protection light is on, delay and protection light off after three minutes, if the back door is not closed or the water flow relay has Fault, protection light will always be on.

3. Open the high voltage, the high pressure will reach 10KV or more, adjust the beam to about 200mA, the screen grid is 20V/100mA, the filament current is 1.2A, the deflection current swings between 1~1.7.

Third, the shutdown sequence

1. Turn off the vacuum meter and turn off the molecular pump.

2. When the molecular pump reaches 50°C, the high valve, the preceding stage, and the mechanical pump are turned off successively. This takes about 40 minutes.

3. When it is less than 50, turn off the pump again. [1]

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2018年03月16日

Vacuum coating equipment operating principle and application industry

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